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high vacuum tube furnace

Model: TF1000-200HV

Category:

Applications:The TF1000-200HV high vacuum tube furnace utilizes far-infrared heating, with high-purity quartz tubes (dehydroxylated). This equipment consists of a vacuum system, heating element, electrical control system, and water cooling system. It is primarily suitable for vacuum annealing processes of semiconductor devices, vacuum brazing, vacuum degassing, refining and heat treatment of metallic materials, and annealing and shaping of nickel-titanium materials in the medical industry.

The TF1000-200HV high vacuum tube furnace utilizes far-infrared heating, and the furnace tubes are made of high-purity quartz (dehydroxylation treated).

1. Main Equipment Parameters:
- Heating Zone Dimensions: Φ180mm*L400mm
- Working Zone Dimensions: Φ180mm*L200mm
- Equipment Footprint: ≈1000mm(L)*1650mm(W)*1400mm(H)

 

2. Hot Zone:
- Extreme Temperature: ≤1000℃
- Working Temperature: ≤950℃
- Heating Power: 12KW
- Rated Power: 15KW
- Temperature Control Accuracy: ±1℃
- Temperature Field: ±5℃ (Unloaded, 5-point measurement after 900℃ holding for 60min)
- Heating Rate: ≤20℃/min (Unloaded)
- Heating Element: Infrared heating tube
- Insulation Material: Ceramic fiber
- Heating Element Distribution Type: Circumferential heating
- Heating Power Control Mode: SCR voltage regulation
- Temperature Measuring Element and Method: N-type thermocouple, 1-point internal temperature measurement
- Temperature Control Mode: PID intelligent adjustment

 

3. Vacuum:
- Cold State Ultimate Vacuum ≤2.0*10-4Pa (Unloaded, clean, degassed, and dry conditions)
- Hot ultimate vacuum: ≤2.0*10-3Pa (Unloaded, 800℃ for 60 min)
Vacuum measurement range: 1.0*105Pa~1.0*10-5Pa
- Vacuum pumping speed: Coarse pumping 8m³/h, Main pumping 600L/S
Vacuum efficiency: Time from 105Pa to 2.0*10-3Pa ≤20min
- Pressure rise rate: ≤1Pa/h (Unloaded, clean, degassed, and dry conditions)


4. Cooling method: Natural cooling (≥600℃)


5. Power supply: 15KW, three-phase five-wire, AC380V±10%, 50HZ


6. Cooling gas and driving gas: Compressed air, 0.4-0.6MPa, Nitrogen, purity better than 99.999%, Inflation pressure ≤5KPa


7. Water Cooling: Inlet water temperature ≤35℃, Water pressure ≈0.1MPa


Structural Features:


1) Vacuum System: The equipment adopts a two-stage vacuum system. The high-vacuum pump is a turbomolecular pump with a pumping speed of 600L/S, and the forestage pump is a two-stage rotary vane pump with a pumping speed of 8m³/h. The entire vacuum system has a high pumping speed, which can ensure the achievement of the vacuum furnace's cold and hot state vacuum indicators.

2) Vacuum measurement: adopts a high-low measurement method. Resistance gauges and ionization gauges are installed on the flange side of the extraction port. The vacuum gauge tube has strong oxidation resistance and is not easily contaminated. Vacuum can be obtained through manual and automatic control. The vacuum system has an interlock function during operation to ensure the safety and stability of the equipment.

3) Heating Element: The furnace lining uses vacuum-formed high-purity alumina lightweight material, and infrared lamps are used as heating elements. A quartz glass tube runs horizontally through the center of the furnace body, sealed at both ends with stainless steel flanges. The sintered material is rapidly heated within the tube. Infrared heating tubes are parallel to the tube and evenly distributed outside, effectively ensuring a uniform temperature field. Internal temperature measurement and control are employed to improve temperature accuracy.

4) Electrical Control System: The electrical control system consists of three parts: temperature program control (using a thyristor, PLC logic controller, and touchscreen system), and mechanical motion program control (using a pressure transmitter and PLC system). It enables both automated and manual control.

5) Temperature Controller: AI series digital intelligent programmable single-loop regulator with an accuracy of 0.1 class. Multiple curves can be set, each with 15 segments. In high-quality heat treatment processes, it accurately determines the operating time of the holding phase.

6) Temperature Measurement Thermocouple: N-type armored thermocouples with internal temperature measurement.

7) Water Cooling System: The equipment's cooling water circuit is a closed-loop circulation system, with flanges, molecular pumps, and other components all circulated with cooling water for cooling. A water pressure switch is installed on the main return water pipe for real-time monitoring of cooling water pressure. A filter screen is installed at the inlet to filter out coarse impurities in the water.

 

Delivery Cycle:

7~30 working days (from the date of receipt of the initial payment to the date of preliminary acceptance by the supplier)

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