high vacuum sliding rail tube furnace
Model: TF1000-250HV-SL
Category:
Applications:The TF1000-250HV-SL high vacuum tube furnace utilizes far-infrared heating, with high-purity quartz tubes (dehydroxylated). This equipment consists of a vacuum system, heating element, horizontal movement device, electrical control system, and water cooling system. It is primarily suitable for vacuum annealing processes of semiconductor devices, vacuum brazing, vacuum degassing, refining and heat treatment of metallic materials, and annealing and shaping of nickel-titanium materials in the medical industry.
The TF1000-250HV-SL high vacuum tube furnace utilizes far-infrared heating, and the furnace tubes are made of high-purity quartz (dehydroxylation treated).
1. Main Equipment Parameters:
Heating Zone Dimensions: Φ240mm*L600mm
Working Zone Dimensions: Φ240mm*L350mm
Equipment Footprint: ≈1000mm(L)*2850mm(W)*1400mm(H)
2. Hot Zone:
- Extreme Temperature: ≤1000℃
- Working Temperature: ≤950℃
- Heating Power: 21KW
- Rated Power: 25KW
- Temperature Control Accuracy: ±1℃
- Temperature Field: ±5℃ (Unloaded, 5-point measurement after 900℃ holding for 60min)
- Heating Rate: ≤20℃/min (Unloaded)
- Heating Element: Infrared heating tube
- Insulation Material: Ceramic fiber
- Heating Element Distribution Type: Circumferential heating
- Heating Power Control Mode: SCR voltage regulation
- Temperature Measuring Element and Method: N-type thermocouple, 1-point internal temperature measurement
- Temperature Control Mode: PID intelligent adjustment
3. Vacuum Facility:
- Cold State Ultimate Vacuum: ≤2.0*10-4Pa (Unloaded, clean, degassed, and dry conditions)
- Hot ultimate vacuum: ≤2.0*10-3Pa (Unloaded, 800℃ for 60 min)
- Vacuum measurement range: 1.0*105Pa~1.0*10-5Pa
- Vacuum pumping speed: Coarse pumping 8m³/h, Main pumping 600L/S
- Vacuum efficiency: Time from 105Pa to 2.0*10-3Pa ≤20min
- Pressure rise rate: ≤1Pa/h (Unloaded, clean, degassed, and dry conditions)
4. Cooling method:
- Cooling method: Natural cooling (≥600℃)
- External air cooling: (<600℃)
5. Power supply: 25KW, three-phase five-wire, AC380V±10% 50HZ
6. Cooling gas and driving gas:
- Driving gas: Compressed air, 0.4-0.6MPa
- Cooling gas: Nitrogen Purity better than 99.999%
- Inflation pressure ≤5KPa
7. Water cooling: Inlet water temperature ≤35℃, 2.3T/h
Water pressure ≈0.1MPa
Structural Features:
1) Temperature Controller: AI series digital intelligent programmable single-loop regulator with an accuracy of 0.1 class. Multiple curves can be set, each with 15 segments. 1) In high-quality heat treatment processes, the operating time of the heat preservation section can be accurately determined.
2) The temperature measuring thermocouples: N-type armored thermocouples, employing internal temperature measurement.
3) The programmable logic controller (PLC): Siemens S7-200 Smart series, controlling mechanical actions and enabling fully automatic control of vacuuming, vacuum valve opening and closing, heating, movement, and gas filling and discharging.
4) Touchscreen: Provides a clear display of the vacuum furnace's operating status. The vacuum furnace has a self-diagnostic function for faults, and features audible and visual alarms and interlocking protection for water pressure, over-temperature, and over-current issues.
5) Cooling water circuit: a closed-loop circulation system, with flanges, molecular pumps, and other components, all circulated with cooling water for cooling. A water pressure switch is installed on the main return water pipe for real-time monitoring of cooling water pressure. A filter screen is installed at the inlet to filter out coarse impurities in the water.
Delivery Cycle:
7~30 working days (from the date of receipt of the initial payment to the date of preliminary acceptance by the supplier)
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